| --- Tue Mar 11 2014 | 00:00 | |
| azonenberg | NullMoogleCable: chemical-mechanical polishing | 01:13 |
|---|---|---|
| azonenberg | i've mostly used it at the die level for deprocessing | 01:13 |
| azonenberg | i have not yet tried to CMP a whole wafer but it's done routinely by fabs | 01:13 |
| Sync__ | it is easy enough | 01:14 |
| azonenberg | Sync__: the hard part is getting everything super-uniform | 01:14 |
| azonenberg | But in this case, if you just want to strip a film | 01:14 |
| azonenberg | and you dont care about the wafer being slightly higher on one side than the other | 01:15 |
| NullMoogleCable | http://wtfmoogle.com/?p=3612 | 01:15 |
| Sync__ | well, as everything it is fiddly to set up | 01:15 |
| azonenberg | then its a lot easier | 01:15 |
| Sync__ | it apparently is really tricky to get wafers with two polished surfaces | 01:16 |
| Sync__ | if you don't care about braking your wafers you can just determine the preferred way of breaking them to know which orientation they are | 01:20 |
| NullMoogleCable | so i found a interesting patent http://www.google.com/patents/US5725742 | 01:20 |
| NullMoogleCable | and it looks expired too | 01:21 |
| Sync__ | nobody will care if you do that | 01:23 |
| Sync__ | I wonder what they used it for, if at all | 01:23 |
| NullMoogleCable | to oxidize silicon without a 1200* oven... | 01:27 |
| Sync__ | the problem is the wafer will have serious ionic contamination | 01:27 |
| NullMoogleCable | how so? | 01:28 |
| Sync__ | the electrolyte contains sodium | 01:28 |
| NullMoogleCable | what would be the effects of said contamination? | 01:30 |
| Sync__ | bad lifetime, meaning slow transistors | 01:33 |
| Sync__ | I'd just shove them through rto | 01:33 |
| NullMoogleCable | rto? | 01:34 |
| Sync__ | rapid thermal oxidation | 01:35 |
| NullMoogleCable | I dont have a oven... yet | 01:36 |
| Sync__ | just get a small glazing oven | 01:41 |
| NullMoogleCable | how much do thoes run? | 01:42 |
| Sync__ | no idea | 01:42 |
| Sync__ | new I guess around 300, used probably around 50-100 | 01:53 |
| azonenberg | sodium? run away | 02:44 |
| --- Wed Mar 12 2014 | 00:00 | |
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