| --- Mon Oct 22 2012 | 00:00 | |
| sputterguy | what's up all | 06:24 |
|---|---|---|
| sputterguy | i got an ion beam sputtering system that has dielectric targets | 06:24 |
| sputterguy | do i need to do anything special to get them loaded in the system? i am only used to sputtering metals | 06:25 |
| azonenberg | Are you using DC or RF? | 06:45 |
| azonenberg | I know you get all kinds of charging if you try to DC sputter a dielectric but afaik it's fine if you are using RF since you charge and discharge every half-cycle | 06:45 |
| sputterguy | azonenberg: i believe it's dc only, but this is dc ion beam sputtering | 07:32 |
| azonenberg | I'm not familiar with ion beam sputtering as opposed to normal magnetron sputtering | 07:33 |
| azonenberg | If the current is only running in one direction you can expect the target to build up a charge and not sputter anymore | 07:33 |
| azonenberg | Pulsing may help to work around that | 07:33 |
| sputterguy | ion beam sputtering involves using a stream of ions to hit the target to dislodge material that is then accelerated using an electric field towards the sample | 07:35 |
| sputterguy | are there more channels like this? | 07:35 |
| sputterguy | this isn't exactly home or cmos | 07:35 |
| sputterguy | is there like a promatsci or something? | 07:35 |
| azonenberg | Not that i know of, this is the de facto microfab channel on freenode | 07:35 |
| sputterguy | well i'm getting sleepy here in lab | 07:36 |
| sputterguy | goodnight | 07:36 |
| --- Tue Oct 23 2012 | 00:00 | |
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