| --- Thu Jun 21 2012 | 00:00 | |
| kimjongun | what do you all think of vacuum annealing? is inert gas annealing better? | 16:48 |
|---|---|---|
| azonenberg | Are you talking for diffusion? | 16:48 |
| kimjongun | like to relieve stress | 16:48 |
| azonenberg | or RTA after ion implantation | 16:49 |
| kimjongun | i'm new sorry. rta? | 16:49 |
| azonenberg | rapid thermal anneal | 16:49 |
| kimjongun | hmm okay | 16:49 |
| azonenberg | And well, i have never done vacuum anneals | 16:50 |
| azonenberg | most of my work so far has been MEMS | 16:50 |
| azonenberg | so i dont do any doping yet | 16:50 |
| azonenberg | when i do dope it will be surface diffusions from doped spin-on glass | 16:50 |
| azonenberg | (in air) | 16:50 |
| azonenberg | Since i'll do an HF strip anyway i dont care about the surface oxidizing | 16:52 |
| azonenberg | and the SOG will be a partial diffusion barrier | 16:52 |
| azonenberg | if i did need to do a non-oxidizing furnace run i'd use Ar most likely | 16:52 |
| --- Fri Jun 22 2012 | 00:00 | |
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