azonenberg | So i'm now pretty convinced that homebrewing a sputtering apparatus is possible | 00:44 |
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Helldesk | do you use any gas in the chambe? | 03:26 |
Helldesk | chamber, that is | 03:26 |
azonenberg | Helldesk: For evaporation? no | 04:37 |
azonenberg | for sputtering, either argon (for normal DC sputtering) | 04:38 |
azonenberg | or argon plus oxygen/nitrogen to reactive sputter oxides and nitrides respectively | 04:38 |
azonenberg | Evaporation is done in the 1E-6 torr range and sputtering at 1E-2 ish | 04:38 |
Helldesk | is that still in the ballistic range or do the sputtered ions do a random walk? | 04:46 |
Helldesk | after they shoot off the target | 04:47 |
azonenberg | Helldesk: Sputtered are random | 04:47 |
azonenberg | And thus the coating is conformal | 04:47 |
azonenberg | Evaporation is ballistic so you can cast shadows etc | 04:48 |
azonenberg | I'm working this weekend but hoping to do Ni + Cr (Ni hardmask over Cr adhesion layer) evap over my latest wafer some time early next week | 04:49 |
azonenberg | then try my second serious attempt at a full through wafer etch | 04:49 |
azonenberg | and hopefully my first successful one :p | 04:49 |
Helldesk | ah, I see | 06:19 |
Helldesk | for Ni, argon seems to be just as good as krypton, and when you're doing Cr too it's the best choice | 06:25 |
azonenberg | Yeah, argon is the de facto standard | 06:25 |
azonenberg | neon and krypton are used occasionally | 06:25 |
azonenberg | but argon is right in the middle mass wise | 06:26 |
azonenberg | cheap | 06:26 |
azonenberg | "good enough" for most purposes | 06:26 |
Helldesk | closest atomic weight to most of the metals needed, right? | 06:26 |
azonenberg | Yeah | 06:28 |
soul-d | http://www.youtube.com/watch?v=PbF-hD5jnr0 nice mems intro | 18:42 |
azonenberg | Nice, will have to check it out at some point | 18:59 |
soul-d | yeah even he drops the die so makes it all worth it to :) | 19:33 |
soul-d | heal yeah :) | 19:38 |
soul-d | http://imgur.com/a/65kr2 | 19:58 |
soul-d | it actualy ssems to work to | 19:58 |
soul-d | but need more cables | 20:03 |
--- Sat Nov 5 2011 | 00:00 |
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