| swkhan | hello =) | 01:53 |
|---|---|---|
| berndj | azonenberg, some possibly useful info: http://www.microchemicals.eu/technical_information/ (i see the word "chromium" for example) | 02:00 |
| azonenberg | berndj: i already raed that lol | 08:27 |
| azonenberg | read* | 08:27 |
| B0101 | hi azonenberg | 11:05 |
| azonenberg | hi | 11:05 |
| azonenberg | Just did some tests of using evaporated Cu over Cr as a wet etch mask for KOH | 11:06 |
| azonenberg | The Si didnt etch at all | 11:06 |
| azonenberg | even though the metal was removed | 11:06 |
| azonenberg | I think that the Cu was removed but the ~5nm of Cr (too thin to see) is still there masking the KOH | 11:06 |
| azonenberg | Going to try repeating the process with a longer HCl etch to make sure the Cr is gone | 11:06 |
| B0101 | oh. and I have found the supplier i was talking about last week | 11:07 |
| azonenberg | nice | 11:07 |
| B0101 | I now got to wait for the wafers to arrive... | 11:08 |
| azonenberg | you actually ordered some? | 11:09 |
| azonenberg | What type | 11:09 |
| CIA-67 | homecmos r121 | trunk/lithography-tests/labnotes/azonenberg_labnotes.txt | Today's lab notes | 11:09 |
| B0101 | azonenberg: p-type wafers, orientation: 100 | 11:10 |
| azonenberg | single polish? 4-inch? | 11:10 |
| B0101 | single polish at 2 inch | 11:11 |
| B0101 | I wonder if my furnace still works though.... | 11:12 |
| azonenberg | Time to find out lol | 11:14 |
| azonenberg | Oxidation is a capability I want but dont have yet | 11:14 |
| azonenberg | i have a toaster oven (goes a little hotter but worse control) for reflow soldering | 11:14 |
| azonenberg | and a nice lab oven | 11:14 |
| azonenberg | but they max out at 260 and 225C respectively | 11:14 |
| azonenberg | then a hot plate | 11:15 |
| B0101 | I think i will need Si 29... | 11:16 |
| azonenberg | ? | 11:16 |
| B0101 | Or silicon isotope 29 | 11:16 |
| azonenberg | Why is that? | 11:17 |
| azonenberg | what does the isotope matter to you | 11:17 |
| azonenberg | I assume you are trying to build electronics and not a nuclear device :p | 11:17 |
| B0101 | azonenberg: I need silicon isotope 29 because of its 1/2 nuclear spin. | 11:18 |
| B0101 | for an experimental Josephson Junction | 11:18 |
| azonenberg | interesting | 11:18 |
| azonenberg | i dont know enough about them to be able to say much | 11:18 |
| azonenberg | all of my work to date has been MEMS based | 11:19 |
| azonenberg | focusing on the mechanics of patterning | 11:19 |
| B0101 | I'm gonna be afk, talk to you in a while | 11:20 |
| azonenberg | k | 11:20 |
| B0101 | i'm back | 11:29 |
| azonenberg | that was fast lol | 11:30 |
| B0101 | just went get the door, and found that my 100+ BC547 transistors have arrived | 11:32 |
| azonenberg | nice | 11:33 |
| B0101 | you can guess what they're for | 11:33 |
| Action: azonenberg is working on database homework due in a few hours | 11:33 | |
| azonenberg | and i dont know the model | 11:33 |
| azonenberg | dont even know if they're fets or bjt | 11:34 |
| B0101 | the bc547 are BJTs | 11:39 |
| azonenberg | So what are you using them on? | 11:42 |
| B0101 | I am using some to repair a board | 11:45 |
| B0101 | and the rest for a homemade CPU | 11:45 |
| B0101 | of course, it will be very slow | 11:45 |
| bart416 | azonenberg, I just managed to extract the electron cannon from the crt's glass tube without damaging | 13:24 |
| bart416 | http://img5.imageshack.us/img5/5226/imag0521gp.jpg | 13:40 |
| bart416 | http://img838.imageshack.us/img838/6015/imag0522q.jpg | 13:40 |
| bart416 | http://img855.imageshack.us/img855/8554/imag0523d.jpg | 13:40 |
| bart416 | http://img577.imageshack.us/img577/7592/imag0524.jpg | 13:40 |
| bart416 | http://img10.imageshack.us/img10/9895/imag0525u.jpg | 13:40 |
| bart416 | http://img820.imageshack.us/img820/4432/imag0526h.jpg | 13:40 |
| bart416 | http://img708.imageshack.us/img708/9610/imag0527.jpg | 13:40 |
| bart416 | http://img51.imageshack.us/img51/4579/imag0528i.jpg | 13:40 |
| bart416 | http://img714.imageshack.us/img714/5077/imag0529w.jpg | 13:40 |
| swkhan | azonenberg: you're still working on the copper stuff? =) | 16:13 |
| swkhan | ever figure out why chromium works? | 16:13 |
| swkhan | or why titanium is used as an adhesion layer for platinum, etc.? | 16:13 |
| bart416 | swkhan, learn some basic chemistry | 16:47 |
| swkhan | bart416: ouch =( i read a book on chemistry, i still don't understand. transitional metals are weird | 16:47 |
| bart416 | You need to look at the oxidation states in specific | 16:48 |
| bart416 | That's the easy guideline | 16:56 |
| bart416 | On the other hand, you need to look at the potential differences for the redox reaction | 16:56 |
| bart416 | And the molecular orbitals | 16:56 |
| bart416 | But to show it easy: Platinum has two common oxidation states 4 and 2 and uncommonly 6 and 3, while Titanium has 4, 3, 2; chrome has 6, 4, 3, 2 | 16:58 |
| bart416 | azonenberg, about that railgun design | 17:34 |
| bart416 | We did some more math | 17:34 |
| bart416 | We figured out if we actually built it like we originally intended to it would have fired | 17:34 |
| bart416 | Once | 17:34 |
| bart416 | It'd rip itself apart (in a cloud of shrapnell I think) | 17:34 |
| azonenberg_work | hi mrdata | 18:38 |
| bart416 | I heard captain picard was still looking for you! | 18:43 |
| mrdata | yes, ever since that incident on romulus | 18:43 |
| mrdata | but, he'll have to wait | 18:43 |
| azonenberg_work | lol | 18:43 |
| bart416 | Strictly speaking the incident wasn't on romulus | 18:44 |
| bart416 | But related to romulans, your memory banks are flawed! | 18:44 |
| mrdata | an unfortunate consequence of the explosion | 18:44 |
| bart416 | I blame listening to trekies whining about irc trolls for knowing such things :| | 18:44 |
| azonenberg_work | lol | 18:45 |
| mrdata | and now to business. so this is the first ive heard of #homecmos | 18:46 |
| mrdata | what goes on, around here? | 18:46 |
| azonenberg_work | mrdata: we've been around for a while but are still small | 18:46 |
| azonenberg_work | As of now i'm the main one doing lab work but am getting good input from others | 18:46 |
| azonenberg_work | B010101 isnt here right now | 18:46 |
| azonenberg_work | but is setting up a lab as well | 18:46 |
| azonenberg_work | she's planning to do work on Josephson junction stuff from what i hear | 18:46 |
| azonenberg_work | i'm focusing on MEMS | 18:46 |
| mrdata | nice | 18:47 |
| azonenberg_work | and am the main one backing the project | 18:47 |
| Action: mrdata wants sketchy homebrew mems sensor devices | 18:47 | |
| mrdata | just to scare people | 18:47 |
| azonenberg_work | mrdata: Once i get a working comb drive | 18:47 |
| azonenberg_work | a mems accelerometer is within reach | 18:47 |
| azonenberg_work | the control stuff will obviously be an external microcontroller and not a stacked-die design like modern ones are | 18:48 |
| azonenberg_work | And bonding is still an unsolved problem | 18:48 |
| bart416 | mrdata, you building an icbm? | 18:48 |
| azonenberg_work | right now i am focusing on fab, and i have a probing station suitable for testing a couple of points | 18:48 |
| azonenberg_work | three probes is enough to do a single transistor | 18:48 |
| azonenberg_work | will need four or five to test gates, unless i hard-wire inputs to Vdd or Vss | 18:48 |
| mrdata | bart416, not building, no; i am curious about what-if scenarios, for global disaster and collapse | 18:49 |
| azonenberg_work | mrdata: a lot of people are | 18:49 |
| azonenberg_work | One thing none of us have touched on is the materials | 18:49 |
| mrdata | so it would be nice to have, let's see.. homebrew hall effect sensor, temperature sensor,... | 18:49 |
| bart416 | After I'm done there'll be no globe left for a global disaster | 18:49 |
| azonenberg_work | photoresist, for example, i have no idea how to make | 18:50 |
| mrdata | silicon purification | 18:50 |
| azonenberg_work | i know the theory behind crystal growth but have no idea how to refine the materials | 18:50 |
| azonenberg_work | Its not something i'd attempt with the setup i have now | 18:50 |
| Action: mrdata has read up on solar grade silicon purification techniques | 18:50 | |
| mrdata | but i havent done any | 18:50 |
| azonenberg_work | Having a Czochralski rig in my basement would be cool | 18:50 |
| azonenberg_work | Make my own 4-inch boules lol | 18:51 |
| azonenberg_work | But i'm not nearly that advanced yet | 18:51 |
| azonenberg_work | bart416: oh, good news | 18:51 |
| Action: mrdata would like to have a x-ray photovoltaic cell | 18:51 | |
| azonenberg_work | a guy i was doing consulting with a while ago needs a sample tested under vacuum | 18:51 |
| azonenberg_work | and is buying me a bell jar and mechanical pump | 18:51 |
| mrdata | nice | 18:51 |
| azonenberg_work | the chamber has feedthroguhs rated to 30A | 18:52 |
| azonenberg_work | Which means that if i can get myself a diffusion or turbopump, setting up a sputtering or filament evaporation system is well within the realm of feasibility | 18:52 |
| mrdata | what pressure will the bell jar reach? | 18:52 |
| azonenberg_work | Its rated to high vacuum iirc | 18:52 |
| mrdata | 1 torr? | 18:52 |
| azonenberg_work | i dont have full details | 18:52 |
| mrdata | less? | 18:52 |
| azonenberg_work | His tests dont need to go too deep | 18:53 |
| azonenberg_work | Personally, i'd like to hit 1E-6 | 18:53 |
| azonenberg_work | which would let me do evaporation | 18:53 |
| azonenberg_work | sputterin i could do at around 1E-1 or -2 | 18:53 |
| azonenberg_work | DC sputtering* | 18:53 |
| azonenberg_work | I wont know for sure until itry pumping it down | 18:54 |
| azonenberg_work | Also, tonight i am going to try running some polishing experimnents | 18:54 |
| azonenberg_work | see if i can take a rough chunk of some material (silicon? metal plate?) and get it to an optical polish or better | 18:55 |
| mrdata | yes | 18:55 |
| azonenberg_work | 1500 grit sandpaper, 6-3-1 um diamond paste | 18:55 |
| azonenberg_work | 50-250nm diamond paste | 18:55 |
| azonenberg_work | then 60nm colloidal silica CMP | 18:55 |
| mrdata | if you had to start from nothing, in the woods, with 18th century equipment, what could you do | 18:58 |
| azonenberg_work | It'd take a while, i dont have the chemistry background | 18:58 |
| mrdata | you'd have to know metallurgy | 18:59 |
| azonenberg_work | One of the first things to do would be to build electric motors (not that hard) for a spin coater and polishing machine | 18:59 |
| azonenberg_work | and a vacuum pump | 18:59 |
| azonenberg_work | which would be necessary for most of the remaining work | 18:59 |
| mrdata | ok, so we'll say you have copper wire (otherwise you have to refine the copper forom ores) | 18:59 |
| azonenberg_work | this assumes you have 1700s era metallurgy available (reasonably pure copper wire) | 18:59 |
| azonenberg_work | and basic steam powered machine tools | 19:00 |
| azonenberg_work | if you dont have the second, get it first | 19:00 |
| mrdata | yes. but you can use your knowledge of modern methods and equipment, to make those | 19:00 |
| azonenberg_work | Correct | 19:00 |
| azonenberg_work | Given the knowledge, they arent that difficult to make | 19:01 |
| azonenberg_work | a few years to get decently working ones at most | 19:01 |
| azonenberg_work | probably less given a good team | 19:01 |
| azonenberg_work | The next step is to start building up stocks of raw materials | 19:01 |
| mrdata | many metals can be made pure by electroforming | 19:01 |
| azonenberg_work | refining pure metals etc | 19:01 |
| azonenberg_work | as well as synthesizing solvents and such | 19:01 |
| azonenberg_work | This is not my area of expertise | 19:02 |
| mrdata | yes. i need catalysts | 19:02 |
| mrdata | platinum, palladium, rare earths,... | 19:02 |
| azonenberg_work | Given somewhat pure materials, you can use float-zone crystallization to make them purer | 19:02 |
| azonenberg_work | among other techniques | 19:02 |
| mrdata | yes that works for silicon | 19:03 |
| azonenberg_work | Photoresist, i have no clue | 19:03 |
| azonenberg_work | the active ingredient in the stuff i use is some long complicated diazo compound abbreviated DNQ | 19:03 |
| azonenberg_work | in a novolac-epoxy resin | 19:03 |
| mrdata | starting from metallurgical grade silicon, (~99% pure), make silicon solar cells | 19:03 |
| mrdata | must purify the silicon to 99.999 | 19:04 |
| azonenberg_work | Ok | 19:04 |
| azonenberg_work | Float zone might work for that | 19:04 |
| azonenberg_work | Repeat a couple of times | 19:04 |
| azonenberg_work | then you can do doping of boron and phosphorus compounds by diffusion | 19:04 |
| azonenberg_work | spin-coat a solution of an alcohol-baseed dopant and heat in air to drive in | 19:05 |
| azonenberg_work | if anyone tries it i'd love to hear the results | 19:08 |
| azonenberg_work | if success, great | 19:08 |
| azonenberg_work | if fail, let us know what you tried and how it failed | 19:08 |
| azonenberg_work | so we wont make the same mistake | 19:08 |
| bart416 | You'd need a SEM to analyse the mistake though :( | 19:11 |
| azonenberg_work | Depends on how small it was | 19:11 |
| azonenberg_work | most of my stuff i can do at least some failure analysis under optical microscopy | 19:11 |
| azonenberg_work | And i want to build a sem at some point | 19:12 |
| azonenberg_work | you have no idea :P | 19:13 |
| azonenberg_work | But knowing the mat sci department's microscopy lab manager has its perks for the short term lol | 19:13 |
| azonenberg_work | i'm last priority in scheduling since i'm not paying, but i can get my analysis done eventually | 19:14 |
| mrdata | microscopy is a critical technology | 19:14 |
| azonenberg_work | mrdata: agreeed | 19:15 |
| azonenberg_work | Optical comes first | 19:15 |
| azonenberg_work | you need to get basic electronics (including single silicon transistors at macroscale) working before you try doing too much of a shrink | 19:15 |
| mrdata | really? | 19:15 |
| mrdata | the scanning/tunneling microscope was a breakthrough | 19:16 |
| azonenberg_work | mrdata: Do optical first | 19:16 |
| mrdata | definitely | 19:16 |
| azonenberg_work | Quick inspection of large samples in full color | 19:16 |
| azonenberg_work | STMs shouldnt be too hard to build | 19:16 |
| azonenberg_work | i actually want to make an STM or AFM some time soon | 19:16 |
| azonenberg_work | then a SEM later on | 19:16 |
| mrdata | if your fab lab is in your living room, how do you handle dust? | 19:17 |
| mrdata | finger prints? | 19:17 |
| mrdata | etc | 19:18 |
| azonenberg_work | mrdata: hair net, lab coat, and rubber gloves | 19:18 |
| azonenberg_work | pretty much eliminates particulates from me | 19:18 |
| azonenberg_work | the ambent levels are low enough that i can live with them given frequent cleaning (right before a film deposition etc) | 19:18 |
| mrdata | so, maybe a dust remover? | 19:19 |
| azonenberg_work | I have not had any issues with dust in air | 19:19 |
| azonenberg_work | when you try shrinking to micron scale or doing mass production cleanroom capability will be nice | 19:19 |
| Action: mrdata imagines an eavesdropper watching thru the window, and getting very confused and worried | 19:19 | |
| azonenberg_work | for research scale on tens-of-microns features? | 19:20 |
| azonenberg_work | not a problem | 19:20 |
| azonenberg_work | mrdata: a friend of mine actually got raided by local cops and some federal folks | 19:25 |
| azonenberg_work | neighbor saw vacuum equipment in his basement and called 911 reporting a bomb | 19:25 |
| azonenberg_work | people are idiots... but he still hasnt gotten his stuff back and the court case isnt over yet | 19:25 |
| azonenberg_work | a year later | 19:25 |
| azonenberg_work | so i've been very paranoid in terms of making sure i'm up front with the landlord etc about whats going on | 19:26 |
| azonenberg_work | msds book in plain view, full fire sprinkler coverage | 19:26 |
| azonenberg_work | proper and documented waste disposal | 19:26 |
| mrdata | residential zoning might forbid some stuff | 19:26 |
| Action: azonenberg_work lives in Highway Commercial zone ;) | 19:27 | |
| mrdata | good | 19:27 |
| azonenberg_work | permits light industrial work including "laboratories for commercial and academic research and development" | 19:27 |
| mrdata | good | 19:27 |
| azonenberg_work | i looked that uup a while ago | 19:27 |
| azonenberg_work | and after a year and a half of living here my ex-cop landlord (retired chief of police actually) hasnt turned me in | 19:28 |
| mrdata | irf the authorities think youre operating a clandestine lab, they'll shut you down. doesnt matter what you make | 19:28 |
| azonenberg_work | so my best guess is he doesnt think i'm doing anything illegal | 19:28 |
| mrdata | so it's good to make sure you dont try to hide | 19:28 |
| azonenberg_work | Yeah | 19:28 |
| azonenberg_work | I dont work outside on the sidewalk to avoid freakng out the neighbors, obviously | 19:29 |
| azonenberg_work | But i also dont make any attempt to hide | 19:29 |
| Action: azonenberg_work makes mental note to add latest purchase of polishing compound to MSDS binder | 19:29 | |
| azonenberg_work | http://www.mtixtl.com/DeskTopSpinCoater0-5100rpmwithCompleteAccessoriesVTC-100P.aspx | 19:38 |
| azonenberg_work | why does it have to be so expensive | 19:38 |
| azonenberg_work | i feel lke i could make something equivalent for $200ish | 19:38 |
| cheater | hi | 19:51 |
| cheater | how is the project coming along :) | 19:51 |
| azonenberg_work | cheater: hi | 19:52 |
| azonenberg_work | Quite well. I did some runs on the 20um process for characterization last night | 19:53 |
| cheater | nice | 19:53 |
| azonenberg_work | http://colossus.cs.rpi.edu/pictures/2011/September/9-13-2011%20-%20lab/S7301813.JPG | 19:53 |
| azonenberg_work | thats 800x magnification | 19:53 |
| cheater | say, is your toolkit mostly geared for digital, or for analog as well? | 19:53 |
| azonenberg_work | nominal line / space dimension 20um | 19:54 |
| cheater | < ignorant | 19:54 |
| azonenberg_work | and i am actually focusing on MEMS, with digital CMOS as a secondary goal | 19:54 |
| cheater | let me just say that looks cool | 19:54 |
| azonenberg_work | http://colossus.cs.rpi.edu/pictures/2011/September/9-13-2011%20-%20lab/S7301812.JPG is 400x | 19:55 |
| azonenberg_work | evaporated copper on silicon | 19:55 |
| azonenberg_work | The roughness you see on the copper is actually the photoresist | 19:55 |
| azonenberg_work | which has not yet been stripped | 19:55 |
| azonenberg_work | the copper itself is very flat | 19:55 |
| cheater | these mems? http://en.wikipedia.org/wiki/Microelectromechanical_systems | 19:56 |
| azonenberg_work | Yes | 19:56 |
| azonenberg_work | A comb drive is my current goal | 19:56 |
| cheater | what does that do? | 19:56 |
| bart416 | btw azonenberg have you tried using comsol for simulations? | 19:56 |
| azonenberg_work | i hope to have a working one on the 20um process (i.e. 20um fingers at 20um spacing) by end of the year | 19:56 |
| azonenberg_work | bart416: no, i have not | 19:56 |
| azonenberg_work | cheater: its a linear actuator much like a solenoid | 19:57 |
| azonenberg_work | except it uses electrostatic instead of magnetic forces | 19:57 |
| cheater | gotcha | 19:57 |
| azonenberg_work | you have two sets of parallel plates | 19:58 |
| azonenberg_work | one fixed and one mounted on a spring | 19:58 |
| azonenberg_work | forming a parallel-plate capacitor | 19:58 |
| azonenberg_work | when you apply a charge to the plates they attract | 19:58 |
| cheater | yes | 19:58 |
| cheater | that is apparent even in capacitors | 19:58 |
| azonenberg_work | Yeah | 19:58 |
| azonenberg_work | Except in this case capacitance is not the goal, it's motion | 19:58 |
| azonenberg_work | The capacitance actually wastes energy - every charge/dischage cycle uses power | 19:59 |
| azonenberg_work | The static power consumption is effectively zero though | 19:59 |
| azonenberg_work | unlike a solenoid | 19:59 |
| azonenberg_work | iow, much like cmos, you only use power when changing state | 19:59 |
| mrdata | what about isentropic switches? | 20:00 |
| azonenberg_work | not familiar with them | 20:00 |
| mrdata | you only use power when you have to destroy bits | 20:00 |
| azonenberg_work | all of my "real" experience has been working with a group building mems | 20:00 |
| azonenberg_work | and all of my home work has been focused on getting a working comb drive | 20:01 |
| cheater | hm | 20:15 |
| cheater | so where could a comb drive be applied? | 20:16 |
| mrdata | some kind of sensor | 20:18 |
| cheater | what about using it to eg change the color of something | 20:20 |
| azonenberg_work | cheater: i dont see that as being too useful | 20:23 |
| azonenberg_work | you could use it on a mems micromirror | 20:23 |
| azonenberg_work | as, for example, part of a DLP array | 20:23 |
| azonenberg_work | If you run it backwards (use low voltage to measure capacitance, rather than high to generate a force) | 20:24 |
| azonenberg_work | you can use it like an accelerometer | 20:24 |
| azonenberg_work | in fact this is how most mems accelerometers work | 20:24 |
| berndj | azonenberg_work, i wonder if your basement czochralski rig is only the beginning of yet another whole stack of tech | 21:21 |
| berndj | specifically, how do you make wafers from boules | 21:22 |
| berndj | <mrdata> if you had to start from nothing, in the woods, with 18th century equipment, what could you do <-- wait, i'll get you a link | 21:23 |
| berndj | hmm, could take a while to find. there was some guy who was building a telegraph from basically nothing | 21:26 |
| berndj | and while you guys are re-bootstrapping tech, i'd propose that we avoid the vacuum tube cul de sac (until we *really* need them) | 21:29 |
| berndj | http://immaculatetelegraphy.tumblr.com/post/235171876 there we go | 21:33 |
| bart416 | telegraphs are easy enough to build berndj | 22:20 |
| berndj | uhm, this guy extracts metals from ore | 22:22 |
| bart416 | so? :P | 22:27 |
| bart416 | You can build a telegraph out of things you find on your desk right now most likely | 22:27 |
| berndj | then again, i could build half a 6-axis robot from what's n front of me | 22:33 |
| bart416 | lol | 23:20 |
| bart416 | from what's in front of me I couldn' build that much, from what's next to me though lol | 23:20 |
| bart416 | Enough transistors to build a small computer xD | 23:20 |
| berndj | hmm, 4 motors and a geiger tube | 23:32 |
| berndj | now all i need is an xray tube and it could be a weld inspection robot | 23:33 |
| azonenberg | lol | 23:33 |
| azonenberg | berndj: also, i dont have a CZ rig yet | 23:34 |
| azonenberg | its on the "would-be-cool-but-not-a-high-priority" list | 23:34 |
| berndj | i know, just extrapolating :) | 23:34 |
| azonenberg | Also, i think tonight or tomorrow morning i am gonna try more double patterning | 23:34 |
| azonenberg | this time with an even shorter exposure | 23:35 |
| azonenberg | say 1 min per shot rather than 2.5 | 23:35 |
| berndj | just how accurately do you need your cuts to be aligned with the crystal planes? | 23:35 |
| azonenberg | So far? Not very | 23:35 |
| azonenberg | i can handle a few degrees off | 23:35 |
| berndj | hehe, i mean in hypothetical CZ-in-basement setup | 23:35 |
| azonenberg | Oh | 23:35 |
| azonenberg | You'd set the seed crystal up as accurately as you can based on a cleavage plane | 23:35 |
| azonenberg | and that sets the orientation for the whole rest of the boule | 23:36 |
| azonenberg | And are you talking orientation of the wafer normal? | 23:36 |
| azonenberg | Or the flat | 23:36 |
| berndj | i suppose it isn't the end of the world if you have < 0.998 0.996 0.005 > instead of <1 1 0> ? | 23:36 |
| azonenberg | For precise etches you normally calibrate by doing a test etch | 23:36 |
| azonenberg | And correct, it isnt | 23:36 |
| azonenberg | in fact, most real wafers are +/- a degree or so afaik | 23:37 |
| berndj | not at 5µm anyway! | 23:37 |
| azonenberg | specifically because that tolerance isnt that crucial | 23:37 |
| berndj | oooh | 23:37 |
| berndj | that's good news then | 23:37 |
| berndj | and how would you saw the boule into wafers? are you positing a diamon wire saw in your basement too? | 23:37 |
| azonenberg | I'd probably get one of those *before* the CZ rig | 23:38 |
| azonenberg | since its useful for other stuff | 23:38 |
| azonenberg | cross section imaging for example | 23:38 |
| --- Fri Sep 16 2011 | 00:00 | |
Generated by irclog2html.py 2.9.2 by Marius Gedminas - find it at mg.pov.lt!
