| azonenberg | Note to self - my denatured alcohol has some sort of contaminant in it | 03:28 |
|---|---|---|
| azonenberg | Totally destroyed film quality | 03:28 |
| azonenberg | when i used undiluted solution it worked | 03:28 |
| bart416 | heh azonenberg | 05:18 |
| CIA-67 | homecmos r113 | trunk/lithography-tests/labnotes/azonenberg_labnotes.txt | Today's lab notes | 05:43 |
| azonenberg | gaah, it didnt work on the other side | 06:08 |
| azonenberg | The cause of the problem is now unknown again | 06:08 |
| azonenberg | The back side of the wafer is pretty screwed up but the front is good enough i can definitely do testing on it | 06:08 |
| azonenberg | though a full working comb drive may prove a little difficult | 06:08 |
| azonenberg | I'm taking that one (2 inch double-side-polish <110>) and another one (2 inch single-side-polish <110>) up to campus tuesday morning for copper/chrome plating | 06:09 |
| azonenberg | and hopefully that night i can start lithography tests | 06:09 |
| azonenberg | also, a quick dip in HF is very effective at removing residue from failed tantalumfilm coating runs | 06:10 |
| azonenberg | takes the native oxide off, as well as whatever is sitting on top | 06:10 |
| azonenberg | a full rca clean is overkill but the hf step works beautifully | 06:10 |
| azonenberg | Still getting some pinholes in the film, not sure where the contaminant is coming from | 06:11 |
| azonenberg | The tantalum oxide step is by far the lowest yield i have on any of my processes | 06:11 |
| azonenberg | even though photoresist is applied on the exact same tool it's been far more cooperative | 06:12 |
| azonenberg | makes me wonder if perhaps i should consider buying some emulsitone glass forming solution instead | 06:12 |
| azonenberg | or using an alternate metal hardmask | 06:13 |
| azonenberg | say, gold over chrome | 06:13 |
| azonenberg | http://mail.mems-exchange.org/pipermail/mems-talk/2009-April/243146.html suggests that it will work well | 06:15 |
| azonenberg | Gold can be etched, afaik, in HCl : H2O2 solution | 06:16 |
| azonenberg | the obvious problem is that its expensive | 06:17 |
| azonenberg | nickel also looks good except its hard to etch | 06:17 |
| azonenberg | Or depsoit, for that matter | 06:19 |
| azonenberg | The paper i'm reading suggests that koh may not attack copper/chrome much though | 06:20 |
| azonenberg | so i want to explore using a CuCr stack as a hardmask without using any ta2o5 under it | 06:20 |
| azonenberg | Back from campus with two freshly CrCu plated 2-inch <110> wafers | 20:46 |
| azonenberg | Should make for a fun evening | 20:46 |
| azonenberg | adhesion seems way better than i got before with just Cu | 20:49 |
| azonenberg | thoguh we wont know for sure until i test | 20:49 |
| bart416 | Well, we shall see eh :D | 20:50 |
| nathan7 | azonenberg: sweet | 21:34 |
| azonenberg | One is double side polished with Ta2O5 over the surface, the other is single side polished and bare | 21:34 |
| azonenberg | both were plated on the polished side(s) with 5-10nm Cr and around 1000nm Cu | 21:35 |
| --- Wed Aug 17 2011 | 00:00 | |
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