| azonenberg | So I think I have a pretty good idea of what's been causing my fab problems | 17:43 |
|---|---|---|
| Action: kristianpaul listen | 17:43 | |
| azonenberg | The layer thickness in lift-off when the deposited layer is spin coated | 17:43 |
| azonenberg | is somewhat dependent on photoresist thickness | 17:43 |
| azonenberg | iow in small features like the 20um squares i was testing on, the hardmask pools in the holes and doesnt thin by too much when spun | 17:44 |
| azonenberg | This results in a several hundred nm to nearly a micron thick hardmask which cracks during the hard bake | 17:44 |
| azonenberg | Now that i've figured out a cleaning process that removes silicon particles left from scribing, i can get away with a far thinner layer | 17:46 |
| azonenberg | So i'm going to dilute the photoresist with acetone and try making it thinner | 17:46 |
| azonenberg | Then spin coat (diluted) hardmask over it | 17:46 |
| azonenberg | Followed by lift-off in acetone | 17:47 |
| azonenberg | The end result should be a much thinner tantalum chloride layer which wont crack during baking | 17:48 |
| kristianpaul | are you afraid something else may crack during bake? | 17:49 |
| kristianpaul | ah, okay more thinner less posible brake :-) | 17:49 |
| azonenberg | There is nothing else to crack lol | 17:49 |
| azonenberg | Just silicon, which doesnt mind heat | 17:49 |
| kristianpaul | hehe, sorry just reading here when have time, but very interesting fnidings :) | 17:50 |
| azonenberg | I feel like i'm getting close | 17:50 |
| azonenberg | I'm knocking off one yield problem after another | 17:50 |
| azonenberg | Oh, thinner photoresist will also expose and develop faster | 17:50 |
| azonenberg | as there's less PR to react with | 17:50 |
| bart416 | azonenberg, would you do it; unpaid internship; agilent | 22:59 |
| azonenberg | bart416: As me (PhD student with full funding) or as you (whatever your situation is)? | 23:00 |
| bart416 | me | 23:00 |
| azonenberg | Whats your situation now? Lol | 23:00 |
| bart416 | In 2 years I'll have a masters degree in EE | 23:00 |
| azonenberg | I could see it being interesting but i suspect you might be able to find a paid position | 23:00 |
| bart416 | Yeah, that's the thing | 23:00 |
| azonenberg | Check TI and all of the other big companies | 23:00 |
| bart416 | TI doesn't really have things in Europe | 23:01 |
| azonenberg | i have a friend doing paid summer work at TI this summer | 23:01 |
| azonenberg | And ok, europe | 23:01 |
| bart416 | I'm also looking into Alcatel-Lucent | 23:01 |
| azonenberg | Not sure what the big companies there are - NXP, renesas? | 23:01 |
| bart416 | (Bell Labs) | 23:01 |
| bart416 | Philips used to do LCD TV R&D not too far from here but they closed it down last year | 23:02 |
| bart416 | Going to ask my professors about maybe something at IMEC | 23:02 |
| bart416 | But yeah, the thing is; eventually on your curriculum; some unknown company vs. agilent | 23:03 |
| bart416 | It's worth considering | 23:03 |
| azonenberg | Agreed | 23:03 |
| azonenberg | I just suggest you look around and try finding another big company that offers paid work | 23:03 |
| bart416 | Yeah | 23:03 |
| bart416 | Might not matter much as I'm looking into a scholarship abroad that would require me to start over but yeah | 23:04 |
| bart416 | But I'll know more about that at the end of the month | 23:04 |
| bart416 | But yeah, I'm going to try to contact somebody at Alcatel, you never know | 23:06 |
| bart416 | Bell Labs isn't exactly a small player either eh :P | 23:06 |
| bart416 | Mhhh, NXP seems to have an office in Leuven | 23:18 |
| bart416 | But that's rather far :( | 23:18 |
| bart416 | If I get up at 5:30 I'd be in Leuven by maybe 8:15 | 23:18 |
| bart416 | I'll look into it | 23:19 |
| bart416 | Mhhh, they're looking for a lot of people at NXP actually in Belgium | 23:21 |
| bart416 | But none in the field that interests me the most :( | 23:21 |
| --- Sun Jul 17 2011 | 00:00 | |
Generated by irclog2html.py 2.9.2 by Marius Gedminas - find it at mg.pov.lt!