| azonenberg | So I'm making progress toward identifying the source of my contaminant | 00:01 |
|---|---|---|
| azonenberg | Going to do several more careful experiments tonight, trying even harder to minimize particulates | 00:02 |
| azonenberg | And, more importantly, imaging samples after each step | 00:02 |
| azonenberg | to determine where the contaminant comes from | 00:02 |
| azonenberg | I'll start with an acetone rinse followed by an RCA clean | 00:02 |
| azonenberg | All glassware was triple rinsed in water followed by one acetone rinse, i'll do one last rinse to remove any dust that might be inside before starting work | 00:23 |
| azonenberg | Spin coat Tantalumfilm on bare silicon | 00:23 |
| azonenberg | Another die, spin coat photoresist, then tantalumfilm (but don't develop the PR) | 00:24 |
| azonenberg | Next one, resist + develop + tantalumfilm | 00:24 |
| azonenberg | And see which step causes it to start getting bumpy | 00:24 |
| azonenberg | Then, when my latest parts order comes in, I'll run the offending solution through an 0.2um filter and see if the problem goes away | 00:25 |
| azonenberg | O_o | 00:48 |
| azonenberg | I forgot that my test dies all this time were surplus wafers :P | 00:49 |
| azonenberg | Upon closer inspection they show visible particulate contamination | 00:49 |
| azonenberg | We'll see if an RCA clean takes it off, if not i'll start using my new wafers lol | 00:49 |
| CIA-67 | homecmos r97 | trunk/lithography-tests/labnotes/azonenberg_labnotes.txt | Updated lab notes for last week's experiments | 00:56 |
| CIA-67 | homecmos r98 | trunk/lithography-tests/default/ (65 files in 65 dirs) | Pushing old edits to lithography-tests default library (obsolete) | 01:18 |
| azonenberg | In other news, glade 4.0.57 fixed the OpenGL bug on Debian-based distros that was annoying me so much | 01:32 |
| azonenberg | before, i had to fall back to non-accelerated rendering (and the accompanying horrible performance) because when i used GL half of the dialog boxes turned blank | 01:32 |
| azonenberg | next step, design a test mask suitable for my current process | 01:34 |
| azonenberg | And hope i can actually get somewhere :) | 01:34 |
| azonenberg_lab | Contaminant positively identified | 02:39 |
| azonenberg_lab | for better or for worse | 02:39 |
| azonenberg_lab | Silicon particles | 02:39 |
| azonenberg_lab | so the next question is, how to remove them | 02:40 |
| azonenberg_lab | And it looks like i have my answer | 03:04 |
| azonenberg_lab | Swab with 70% IPA followed by RCA clean | 03:04 |
| azonenberg_lab | wolfspraul: Getting better results finally, i'm halfway through an experiment that if successful will give me 20um features in <100> Si | 04:18 |
| azonenberg_lab | My mystery contaminant is almost 100% identified as silicon particles from dicing | 04:18 |
| wolfspraul | he :-) | 04:21 |
| azonenberg_lab | I was wondering why spectroscopy didnt show anything but hardmask and silicon | 04:21 |
| wolfspraul | good news is so powerful, keep it coming and good luck! | 04:21 |
| azonenberg_lab | Turns out, thats all i had :P | 04:21 |
| azonenberg_lab | But said silicon wasnt entirely flat | 04:22 |
| azonenberg_lab | i need to explore ways of removing it, sonication is a possibility | 04:22 |
| azonenberg_lab | right now i'm just rubbing with a swab, it got off most but there are still a few little bits | 04:22 |
| azonenberg_lab | But in any case, this experiment i'm about to run should give me feedback as to whether i reduced particle counts successfully or not | 04:24 |
| azonenberg_lab | Even if it doesnt work entirely | 04:24 |
| azonenberg_lab | First die was overdeveloped, second one didnt resolve the entire pattern but is good for a first try | 04:45 |
| azonenberg_lab | No visible cracking in the important parts | 04:45 |
| azonenberg_lab | going to pop it in the oven in a few mins to bake for an hour, then KOH etch | 04:45 |
| CIA-67 | homecmos r99 | trunk/lithography-tests/labnotes/azonenberg_labnotes.txt | Tonight's lab notes (still in progress) | 04:50 |
| CIA-67 | homecmos r100 | trunk/lithography-tests/labnotes/azonenberg_labnotes.txt | Merging earlier changes to lab notes | 04:57 |
| CIA-67 | homecmos r101 | trunk/lithography-tests/labnotes/azonenberg_labnotes.txt | Today's lab notes | 06:23 |
| --- Sat Jul 16 2011 | 00:00 | |
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